Crystallization of Sol-Gel Processed PZT Films with Low Temperatures and Short Times Using UV-Assisted Rapid Thermal Annealing

摘要

Excimer UV-assisted rapid thermal annealing (UV-RTA) was employed to obtain the perovskite crystalline phase of Pb(Zr_(0.53)Ti_(0.47))O_3 (PZT) films processed from three different sols. Sol-I contained 2-methoxyethanol as the solvent and Pb-acetate, Zr-acetylacetonate, Ti-isopropoxide were the precursors for Pb, Zr, and Ti respectively. Sol-II contained acetic acid as the solvent and the corresponding precursors were Pb-acetate, Zr-propoxide and Ti-isopropoxide. Sol-III contained 1,3-propanediol as the solvent and the respective precursors were Pb-acetate, Zr-acetylacetonate, and Ti-diisopropoxide bis-acetylacetonate. It was observed that sol-III was the most sensitive to UV (222 nm) exposure at an intensity of approx 40 mW/cm~2 and resulted single phase perovskite PZT films at an annealing temperature of 500 deg C by employing UV-RTA in compare to that of 550 deg C or more required for obtaining single phase perovskite films using the sol-I and II even under UV-irradiation. Moreover, the films obtained from the sol-III have good ferroelectric properties with a P_r value of approx 20 mu C/cm~2 along with E_c of 38 kV/cm. The probable dissociation chemistry has been discussed based on the Fourier transform infrared (FTIR) analysis.