Investigation of the Liquid Loading Effect on the Flexible Acoustic Wave Devices for in-Liquid Sensing Applications

摘要

Flexible electronics has many unique qualities such as bendable, lightweight and low-cost fabrication, and are particularly suitable for biosensor applications. Biosensors based on acoustic wave devices feature high resolution, digital output, and wireless operation. In this paper, we address the important issue when the flexible acoustic wave devices are used in liquid for sensing applications. A two-port resonator structure is proposed to implement the flexible acoustic wave device. Electrical measurements were conducted for the same device under various environments, and the liquid loading induced lowering of the quality factor are analyzed.