石英上准纵漏表面声波在液体传感方面的潜在应用

摘要

本文报道了石英材料上一种新的可用于液体传感的准纵漏声表面波模式的传播方向，即Euler角为[0°，136°，50°]的传播方向，并对该传播方向上准纵漏声表面波在液体传感方面的应用进行了初步研究．结果表明：与目前常用液体声表面波传感器所用声波模式所在传播方向相比较，这种新的传播方向上存在较少的声表面波模式，当应用于液体传感时只有准纵漏声表面波一种模式存在．特别是，该传播方向上准纵漏声表面波频率温度系数实验测量值为-31．13ppm／C．这些特性使得本文所提传播方向上准纵漏声表面波具有很好的应用前景．%This paper investigate potentiality of a novel propagation direction of quasi-longitudinal leaky surface acoustic wave (QILSAW) propagating on the surface of quartz for sensing liquid materials. Experiments show that, phase velocity reaches 6743 m/s, propagation atten uation is less than 10-4dB/λ in this specified direction, with Euler angle [0°,136°,50°]. Par ticularly, based on this wave mode with longitudinal polarized displacement, SAW sensors to be used in liquid can be realized, and spurious interference from normal SAW, leaky surface a coustic wave and bulk wave can be eliminated. Particularly, temperature coefficient of frequen cy of QLLSAW reaches-31.13 ppm/C.