DEVICE FOR MAKING LIQUID PHASE BULK ACOUSTIC WAVES AND USE FOR LIQUID PHASE FOR SENSING

摘要

Described is a device is for making bulk acoustic waves in a liquid sample. The device includes a piezoelectric substrate. An input interdigital transducer is located in a region on a surface of the piezoelectric substrate. An output interdigital transducer is located in the region on the surface of the piezoelectric substrate. A sensing area is between the output interdigital transducer and the input interdigital transducer. A channel is configured to contain liquid over the region including the sensing area.