Thermochemical technology of the layer-by-layer synthesis of multilevel chromium masks as precision molds for the phase shaping of high-efficiency large-aperture lenses

摘要

Abstract: The new technology of the high-efficient large-aperture multilevel diffractive optical elements manufacture is examined. This technology is based on the properties of the laser thermochemical writing of hidden images in chromium films and possibilities of the circular laser photoplotter CLWS-300. The ultra-high resolution interferometric method is used for the hidden image precision alignment.!10