School of Mechanical Engineering, Shanghai Jiao Tong University, Shanghai, China;
School of Mechanical Engineering, Shanghai Jiao Tong University, Shanghai, China;
School of Mechanical Engineering, Shanghai Jiao Tong University, Shanghai, China;
School of Mechanical Engineering, Shanghai Jiao Tong University, Shanghai, China;
substrate temperature; uniformity; diamond films;
机译:热丝CVD法模拟硅片上金刚石薄膜生长中衬底温度分布
机译:热丝CVD在硅片上金刚石膜生长中温度和气体密度场分布的模拟
机译:在低衬底温度下{100}取向CVD金刚石膜生长的原子尺度KMC模拟-第二部分C-H系统和含Cl体系中CVD金刚石膜生长的模拟
机译:用热丝CVD模拟金刚石薄膜生长的衬底温度分布
机译:用于大面积金刚石膜沉积的热丝CVD反应器中的多丝阵列和衬底支架的设计
机译:封闭热丝CVD系统中金刚石膜的沉积
机译:用热丝CVD法模拟硅片上金刚石薄膜生长中衬底温度分布