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Simulation of Substrate Temperature Distribution in Diamond Films Growth on Silicon Wafer by Hot Filament CVD

机译：用热丝CVD法模拟硅片上金刚石薄膜生长中衬底温度分布

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T. Zhanga; J. G. Zhangb; B. Shenc; F. H. Sund;
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1. Simulation of Substrate Temperature Distribution in Diamond Films Growth on Silicon Wafer by Hot Filament CVD [J] . T. Zhang, J.G. Zhang, B. Shen, Materials science forum . 2012,第期

机译：热丝CVD法模拟硅片上金刚石薄膜生长中衬底温度分布
2. Simulation of temperature and gas density field distribution in diamond films growth on silicon wafer by hot filament CVD [J] . Tao Zhang, Jianguo Zhang, Bin Shen, Journal of Crystal Growth . 2012,第1期

机译：热丝CVD在硅片上金刚石膜生长中温度和气体密度场分布的模拟
3. Atomic scale KMC simulation of {100} oriented CVD diamond film growth under low substrate temperature ―Part Ⅱ Simulation of CVD diamond film growth in C-H system and in Cl-containing systems [J] . Xizhong An, Yu Zhang, Guoquan Liu, Journal of University of Science and Technology Beijing . 2002,第6期

机译：在低衬底温度下{100}取向CVD金刚石膜生长的原子尺度KMC模拟-第二部分C-H系统和含Cl体系中CVD金刚石膜生长的模拟
4. Simulation of Substrate Temperature Distribution in Diamond Films Growth on Silicon Wafer by Hot Filament CVD [C] . T. Zhang, J.G. Zhang, B. Shen, Advances in materials manufacturing science and technology XIV . 2011

机译：热丝CVD法模拟硅片上金刚石薄膜生长中衬底温度分布
5. Design of multi-filament arrays and substrate holders in hot-filament CVD reactors for large area diamond film deposition [D] . Li, Jun 1997

机译：用于大面积金刚石膜沉积的热丝CVD反应器中的多丝阵列和衬底支架的设计
6. Deposition of Diamond Films in a Closed Hot Filament CVD System [O] . Guan-Ren Lai, E. N. Farabaugh, A. Feldman, 1995

机译：封闭热丝CVD系统中金刚石膜的沉积
7. Special Issue/Deposition Methods, Characterizations and Applications of Diamond Films. Growth of Diamond Thin Films Formed by Hot Filament CVD and Electron Assisted CVD. [O] . Atsuhito SAWABE 1991

机译：钻石电影的特殊问题/沉积方法，表征和应用。通过热长丝CVD和电子辅助CVD形成的金刚石薄膜的生长。

Simulation of Substrate Temperature Distribution in Diamond Films Growth on Silicon Wafer by Hot Filament CVD

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