Simulation and analysis of actuation voltage of electrostatically actuated RF MEMS cantilever switch

摘要

This paper presents the simulation and analysis of radio frequency (RF) micro-electromechanical systems (MEMS) cantilever switch. Since power consumption becomes the highest concern in many devices thus the main focus in this research is to obtain low actuation voltage for RF MEMS switch. The switch simulated in this research was using electrostatic actuation method. COMSOL Multiphysics software been used to simulate the switch. Different designs and parameters such as the air gap, cantilever thickness and Young Modulus value depends on different material have been chosen for analysing the actuation voltage. From the simulation results, analysis been done for the lowest actuation voltage. The designed switched with the lowest spring constant and smaller air gap had obtained 6.89V. Thus, these two main criteria gave the lowest actuation voltage and this result aligns with the physical equation.