RFMEMS悬臂梁开关的设计与仿真

摘要

利用有限元软件HFSS和ANSYS系统研究了串联MEMS开关的微波性能和力学性能与其结构参数之间的关系,并在此基础上优化出悬臂梁开关的几何结构参数,设计了RF MEMS开关,实验表明:在外施电压为10V左右时,悬臂梁的挠度可达3μm左右,5GHz时,回波损耗小于0.2dB,隔离度大于35dB.%With the HFSS and ANSYS software, the relationship between the structure parameters of the RF MEMS series switch and its microwave characteristics and the mechanical behaviors is studied respectively. Based on the findings, the better geometric parameters of the cantilever is found. An RF MEMS switch is designed. Experiment shows that at 10 V, the deflections of the cantilever are around 3 μm. At 5 GHz,an echo loss is smaller than 0.2 dB and isolation is larger than 35 dB.