Fabrication Process for Cantilever Beam Micromechanical Switches

摘要

This report presents a detailed process description for fabrication of amicromechanical accelerometer sensor switch. The switch consists of a metallic cantilever beam structure that is defined with silicon micromachining processing technology. The beam is made up of a gold-nickel-gold trimetallic structure, which is anchored at one end to a silicon substrate; the process was designed to be compatible with current integrated circuit technology used in industry. Accelerometer, Cantilever beam, Switch.