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Graphene cantilever beams for nano switches

机译：用于纳米开关的石墨烯悬臂梁

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摘要

a method named sacrificial beam is presented to fabricate graphene cantilever devices. the mechanical properties of graphene cantilevers are studied using atomic force microscopy. graphene cantilever based 2-terminal nano-electro-mechanical systems switches are demonstrated; and their dc characteristics and switch performance are investigated. a 3-terminal switch based on a graphene cantilever is fabricated; and its electrical properties are also studied.
机译：提出了一种称为牺牲梁的方法来制造石墨烯悬臂器件。利用原子力显微镜研究了石墨烯悬臂的力学性能。展示了基于石墨烯悬臂的2端子纳米机电系统开关；并研究了它们的直流特性和开关性能​​。制造基于石墨烯悬臂的三端开关；并对其电性能进行了研究。

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  • 来源
    《Applied Physics Letters》 |2012年第9期|p.093111.1-093111.5|共5页
  • 作者

    Peng Li; Zheng You; Tianhong Cui;

  • 作者单位

    Department of Mechanical Engineering, University of Minnesota, Minneapolis, Minnesota 55455, USA Department of Precision Instruments and Mechanology, State Key Laboratory of Precision Measuring Technology and Instruments, Tsinghua University, Beijing 100084, People's Republic of China;

    Department of Precision Instruments and Mechanology, State Key Laboratory of Precision Measuring Technology and Instruments, Tsinghua University, Beijing 100084, People's Republic of China;

    Department of Mechanical Engineering, University of Minnesota, Minneapolis, Minnesota 55455, USA Department of Precision Instruments and Mechanology, State Key Laboratory of Precision Measuring Technology and Instruments, Tsinghua University, Beijing 100084, People's Republic of China;

  • 收录信息 美国《科学引文索引》(SCI);美国《工程索引》(EI);美国《生物学医学文摘》(MEDLINE);
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