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SEMICONDUCTOR DEVICE WITH U-SHAPED CHANNEL AND MANUFACTURING METHOD THEREOF, AND ELECTRONIC APPARATUS INCLUDING THE SAME
SEMICONDUCTOR DEVICE WITH U-SHAPED CHANNEL AND MANUFACTURING METHOD THEREOF, AND ELECTRONIC APPARATUS INCLUDING THE SAME
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机译:具有U形通道的半导体器件及其制造方法,以及包括该的电子设备
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摘要
A semiconductor device with a U-shaped channel and a manufacturing method thereof and an electronic apparatus including the semiconductor device are disclosed. According to embodiments, the semiconductor device may include: a channel portion extending vertically on a substrate and having a U-shape in a plan view; source/drain portions located at upper and lower ends of the channel portion and along the U-shaped channel portion; and a gate stack overlapping the channel portion on an inner side of the U shape.
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