Semiconductor device comprising N-channel and P-channel transistors and production method

摘要

A semiconductor device, e.g., a complementary circuit comprising an n-channel transistor (Qn) utilizing a two-dimensional electron gas and a p-channel transistor (Qp) utilizing a two-dimensional hole gas, comprises: a semi-insulating GaAs substrate; a channel layer of an i-type GaAs having n+-type source and drain regions and p+-type source and drain regions; a buffer layer of an i-type AlGaAs preventing carriers from passing therethrough; first and second control layers of GaAs or AlGaAs having n-type or p-type conductivity, these layers being epitaxially formed in sequence on the substrate by an MBE method or an MOCVD method; and metal electrodes formed on the first and second control layers, n+-type regions and p+-type regions.