COMPOSITION FOR FORMATION OF SBTN FERROELECTRIC THIN FILM, AND METHOD FOR FORMATION OF SBTN FERROELECTRIC THIN FILM

摘要

PROBLEM TO BE SOLVED: To obtain a composition for formation of an SBTN ferroelectric thin film having an excellent shelf stability for a long term of period, and also to obtain a method for forming an SBTN ferroelectric thin film using the composition.;SOLUTION: The composition for formation of an SBTN ferroelectric thin film of a layered perovskite type contains an alkoxide of metals of Sr, Bi, Ta and Nb, its partial hydrolyzate, and/or organic acid salt. The composition contains particles having diameter sizes of 0.5 μm or more in 50 or less particles/mL. In the method for forming the SBTN ferroelectric thin film by coating the composition on a heat-resistive substrate, repeating a step of heating the substrate in the air, in an oxidizing atmosphere or in an atmosphere containing vapor until the film has a desired thickness, and sintering the film at a temperature of a crystallization temperature or more at least during heating in the final step or after the heating.;COPYRIGHT: (C)2000,JPO