COMPOSITION FOR FERROELECTRIC THIN FILM FORMATION, METHOD FOR FERROELECTRIC THIN FILM FORMATION, AND FERROELECTRIC THIN FILM FORMED BY THE METHOD

摘要

PLZT, a ferroelectric thin film formation composition for forming the one type of the ferroelectric thin film selected from the group consisting of PZT, and PT is a general formula _{(1): (Pb x La} y) (Zr z Ti (1-z)) O 3 (formula (1) of 0.9 x 1.3, 0 y 0.1, 0 z 0.9), the composite metal oxide A represented by a liquid composition for forming a thin film composite oxide B containing a P (phosphorus) is takes the form of a mixed mixed composite metal oxide, for forming the composite metal oxide A raw material and made of an organic metal compound solution is the raw material which is dissolved in an organic solvent in a ratio to give the metal atom ratio represented by the general formula (1) for constituting the composite oxide B. ;