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Method for fabricating a micromachined chip scale package

机译:制造微加工芯片级封装的方法

摘要

A chip scale package comprised of a semiconductor die having a silicon blank laminated to its active surface. The bond pads of the die are accessed through apertures micromachined through the blank. The package may be employed with wire bonds, or solder or other conductive bumps may be placed in the blank apertures for flip-chip applications. Further, the package may be employed to reroute external connections of the die to other locations, such as a centralized ball grid array, or in an edge-connect arrangement for direct or discrete die connect (DDC) to a carrier. It is preferred that the chip scale package be formed at the wafer level, as one of a multitude of packages so formed with a wafer-level blank, and that the entire wafer be burned-in and tested to identify the known good die (KGD) before the wafer laminate is separated into individual packages.
机译:一种芯片级封装,包括半导体管芯,该半导体管芯具有层压至其有源表面的硅毛坯。管芯的焊盘通过穿过毛坯的微加工孔进入。该封装可以与引线键合一起使用,或者可以将焊料或其他导电凸块放置在用于倒装芯片应用的空白孔中。此外,封装可以用于将管芯的外部连接重新路由到其他位置,例如集中式球栅阵列,或者以边缘连接布置用于直接或离散管芯连接(DDC)到载体。优选地,芯片级封装在晶片级上形成,作为如此形成的具有晶片级坯料的多个封装之一,并且整个晶片都被烧入并测试以识别已知的良好管芯(KGD)。 ),然后再将晶片层压板分成独立的包装。

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