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Polished polymide substrate

机译:抛光聚酰亚胺基材

摘要

Polymer substrates, in particular polyimide substrates, and polymer laminates for optical applications are described. Polyimide substrates are polished on one or both sides depending on their thickness, and single-layer or multi-layer waveguide structures are deposited on the polished polyimide substrates. Optical waveguide devices are machined by laser ablation using a combination of IR and UV lasers. A waveguide-fiber coupler with a laser-machined groove for retaining the fiber is also disclosed.
机译:描述了聚合物基材,特别是聚酰亚胺基材,以及用于光学应用的聚合物层压材料。根据它们的厚度在一侧或两侧抛光聚酰亚胺衬底,并且在抛光的聚酰亚胺衬底上沉积单层或多层波导结构。使用IR和UV激光的组合通过激光烧蚀加工光波导器件。还公开了具有用于固持光纤的激光加工凹槽的波导光纤耦合器。

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