首页> 外国专利> METHOD AND APPARATUS FOR MANUFACTURING OPTICAL THIN FILM UTILIZING SPUTTER DEPOSITION METHOD AND THE THIN FILM MADE BY THE METHOD

METHOD AND APPARATUS FOR MANUFACTURING OPTICAL THIN FILM UTILIZING SPUTTER DEPOSITION METHOD AND THE THIN FILM MADE BY THE METHOD

机译:利用溅射沉积方法制造光学薄膜的方法和装置以及用该方法制得的薄膜

摘要

The present invention for forming an optical thin film to change to match the optical properties such as reflectance transmittance, particularly, by using a sputtering vapor deposition apparatus relates to a manufacturing apparatus and method and an optical thin film of the optical thin film using a sputtering method on the object, is installed on the center side of the sputtering chamber (not shown) with which the rotation center shaft 10; Rotary panel 20 is installed rotating on the central shaft (10) and; Interlocking connection to the central shaft 10, shaft 30 and; The rotary panel is installed on a side edge surface of glass 40 to be rotated are connected to the connecting shaft 30, and the material is deposited mounting shaft 50 which is attached to the surface of portion 20; High refractive cathode which face each other with the center position of the center axis 10 to the outer side of the rotation panel (20) (Cathode: 60) and the low refractive cathode: is configured to include a (Cathode 70), the conventional electron beam increase productivity than the method according to the deposition apparatus and, to a thin film to have a strong attractive force.
机译:特别是,通过使用溅射气相沉积设备来形成光学薄膜以改变以匹配诸如反射率透射率的光学特性的本发明涉及一种制造设备和方法以及使用溅射的光学薄膜的光学薄膜在该对象的方法中,在安装有旋转中心轴10的溅射室(未图示)的中央侧安装有该方法。旋转面板20安装成在中心轴(10)上旋转,并且;互锁连接到中心轴10,轴30和;旋转面板安装在玻璃40的要旋转的侧边缘表面上,并连接至连接轴30,并且材料沉积安装轴50,该安装轴50附接至部分20的表面;传统上,以中心轴10的中心位置朝向旋转面板(20)的外侧彼此面对的高折射阴极(阴极:60)和低折射阴极:被配置为包括(阴极70)。电子束比根据沉积设备的方法提高生产率,并且使薄膜具有强吸引力。

著录项

  • 公开/公告号KR20050100542A

    专利类型

  • 公开/公告日2005-10-19

    原文格式PDF

  • 申请/专利权人 AVATEC CO. LTD.;

    申请/专利号KR20040025942

  • 申请日2004-04-14

  • 分类号C23C14/34;

  • 国家 KR

  • 入库时间 2022-08-21 22:04:24

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