Test object CALIBRATION scanning electron and scanning probe microscopes

摘要

1.the test object u0434u043bu00a0 sized raster electronic microscope and scanning u0437u043eu043du0434u043eu0432u044bu0445, constructed in the shape of the structure with a raised surface elements over s have a profile with u043fu0440u043eu0435u043au0446u0438u00a0u043cu0438 sides at the lower u043eu0441u043du043eu0432u0430u043du0438u00a0, exceeding the size of system ram and ssm.and in all the elements of a raised surface is an acute angle between the side u043fu043eu0441u0442u043eu00a0u043du043du044bu0439 edge and the plane of the lower u043eu0441u043du043eu0432u0430u043du0438u00a0, u043eu0442u043bu0438u0447u0430u044eu0449u0438u0439u0441u00a0, relief to don't in the form of a combination of steps, at least two of which u0441u0442u044bu043au0443u044eu0442u0441u00a0 angle, not equal to, and not a multiple of 180.;2. the test object 1, u043eu0442u043bu0438u0447u0430u044eu0449u0438u0439u0441u00a0, u0441u0442u044bu043au0443u044eu0449u0438u0435u0441u00a0 stairs are located at an angle of 90 to each other.;3. the test object on any of the u043fu043f.1 and 2, u043eu0442u043bu0438u0447u0430u044eu0449u0438u0439u0441u00a0, four pairs of u0441u0442u044bu043au0443u044eu0449u0438u0445u0441u00a0 steps form an embossed structure u043au0440u0435u0441u0442u043eu043eu0431u0440u0430u0437u043du043eu0433u043e protuberances.