Quantitative Electron Probe Microanalysis Using a Scanning Electron Microscope and an X-Ray Energy Spectrometer

摘要

A procedure was developed to utilize a scanning electron microscope and X-ray energy spectrometer to obtain quantitative elemental analysis. The precision and accuracy of an X-ray intensity ratio data processing technique has been evaluated. In general, the quantitative results obtained were accurate to better than + or - 1 percent of the certified elemental compositions of standard reference materials for all elements present at greater than 2 weight percent. Results were reproducible to better than 1 percent of the determined percentage compositions. Elements present at less than 0.1 weight percent composition and elements having atomic numbers less than 11 (sodium) were not detected. (Author)