Scanning probe microscope and scanning probe microscope system as well as methods for examining a test object surface

摘要

The invention relates to a scanning probe microscope (12) with (a) a first drive (14.1), (b) a second drive (14.2), (c) a third drive (14.3), (d) a fourth drive (14.4), ( e) a fifth drive (14.5) and (f) a probe (16) which can be moved by means of the drives (14). According to the invention it is provided that (g) the probe (16) can be moved in five degrees of freedom by means of the drives (14) and (h) the scanning probe microscope (12) is designed as a microsystem.