A tray having a heat generating unit is provided to increase temperature uniformity and improve the quality of a layer by increasing thermal transfer efficiency of a substrate which is placed in a tray. A tray(100) for loading and transferring substrates includes a tray body(110), a heat generating unit(120) installed in the tray body, and a power connection part electrically connected to the heat generating unit wherein an external power source is connected to the power connection part. The heat generating unit can be a plate heater of a planar type that includes a coil and an insulation material surrounding the coil.
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