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SILICON SINGLE CRYSTAL MANUFACTURING METHOD, SILICON SINGLE CRYSTAL, SILICON WAFER, APPARATUS FOR CONTROLLING MANUFACTURE OF SILICON SINGLE CRYSTAL, AND PROGRAM
SILICON SINGLE CRYSTAL MANUFACTURING METHOD, SILICON SINGLE CRYSTAL, SILICON WAFER, APPARATUS FOR CONTROLLING MANUFACTURE OF SILICON SINGLE CRYSTAL, AND PROGRAM
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机译:硅单晶制造方法,硅单晶,硅晶片,用于控制硅单晶制造的装置和程序
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摘要
According to a method of manufacturing a silicon monocrystal by FZ method, a P-type or N-type silicon crystal having been pulled up by CZ method is used as a raw material (6). While impurities whose conductivity type is the same as that of the raw material (6) are supplied by a gas doping method, the raw material (6) is recrystallized by an induction-heating coil (3) for obtaining a product-monocrystal (8).
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