Layered CU-based electrode for high-dielectric constant oxide thin film-based devices
展开▼
机译:用于高介电常数氧化物薄膜基器件的层状CU基电极
展开▼
页面导航
摘要
著录项
相似文献
摘要
A layered device including a substrate; an adhering layer thereon. An electrical conducting layer such as copper is deposited on the adhering layer and then a barrier layer of an amorphous oxide of TiAl followed by a high dielectric layer are deposited to form one or more of an electrical device such as a capacitor or a transistor or MEMS and/or a magnetic device.
展开▼