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SILICON/GOLD SEED STRUCTURE FOR CRYSTALLINE ALIGNMENT IN A FILM STACK
SILICON/GOLD SEED STRUCTURE FOR CRYSTALLINE ALIGNMENT IN A FILM STACK
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机译:硅/金种子结构用于薄膜堆叠中的结晶对齐
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摘要
A silicon/gold (Si/Au) bilayer seed structure is located in a film stack between an amorphous or crystalline lower layer and an upper layer with a well-defined crystalline structure. The seed structure includes a Si layer on the generally flat surface of the lower layer and a Au layer on the Si layer. The Si/Au interface initiates the growth of the Au layer with a face-centered-cubic (fcc) crystalline structure with the (111) plane oriented in-plane. The upper layer grown on the Au layer has a fcc or hexagonal-close-packed (hcp) crystalline structure. If the upper layer is a fcc material its [111] direction is oriented substantially perpendicular to the (111) plane of the Au layer and if the upper layer is a hcp material, its c-axis is oriented substantially perpendicular to the (111) plane of the Au layer.
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机译:硅/金(Si / Au)双层种子结构位于非晶或结晶的下层和具有明确定义的结晶结构的上层之间的薄膜叠层中。种子结构包括在下层的大致平坦的表面上的Si层和在Si层上的Au层。 Si / Au界面以面心立方(fcc)晶体结构(面(111)面朝内)启动了Au层的生长。在金层上生长的上层具有fcc或六方密堆积(hcp)晶体结构。如果上层是fcc材料,则其[111]方向基本上垂直于Au层的(111)平面;如果上层是hcp材料,则其c轴基本上垂直于(111) Au层的平面。
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