Silicon / gold seed structure for the crystal alignment in the film stack

摘要

PROBLEM TO BE SOLVED: To provide a silicon/gold seed structure for crystal alignment in a film stack.;SOLUTION: A silicon/gold (Si/Au) bilayer seed structure is positioned in a film stack between an amorphous or crystalline lower layer and an upper layer with a well-defined crystalline structure. The seed structure includes an Si layer on the generally flat surface of the lower layer and an Au layer on the Si layer. An Si/Au interface starts the growth of the Au layer with a face-centered-cubic (fcc) crystalline structure having a (111) plane oriented in-plane. The upper layer grown in the Au layer has the fcc or a hexagonal-close-packed (hcp) crystalline structure. If the upper layer is an fcc material, its [111] direction is oriented substantially perpendicular to the (111) plane of the Au layer. If the upper layer is an hcp material, its c axis is oriented substantially perpendicular to the (111) plane of the Au layer.;COPYRIGHT: (C)2012,JPO&INPIT