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Nonvolatile semiconductor device including a floating gate, method of manufacturing the same and associated systems

机译:包括浮栅的非易失性半导体器件,其制造方法及相关系统

摘要

A memory device includes a first floating gate electrode on a substrate between adjacent isolation layers in the substrate, at least a portion of the first floating gate protruding above a portion of the adjacent isolation layers, a second floating gate electrode, electrically connected to the first floating gate electrode, on at least one of the adjacent isolation layers, a dielectric layer over the first and second floating gate electrodes, and a control gate over the dielectric layer and the first and second floating gate electrodes.
机译:一种存储装置,包括:第一浮栅电极,位于衬底上的相邻隔离层之间的衬底上;第一浮栅的至少一部分,突出于相邻隔离层的一部分上方;第二浮栅电极,其电连接至第一浮栅电极。浮栅电极,在至少一个相邻的隔离层上,在第一和第二浮栅电极上的介电层,以及在介电层和第一和第二浮栅电极上的控制栅。

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