Method of correcting defect in EUVL mask

摘要

EUV mask defect correction method of the present invention is ready to repair tip is bonded to the surface monolayer , and that step , by placing the tip on the repair defects in EUV mask and coupling attached to the monolayer and fault repair tips, and to move in a direction away from the Repair Tips on EUV mask defect is separated from the EUV mask includes a step .