ION GENERATION DEVICE CAPABLE OF PREVENTING THE DEGRADATION OF ELECTRICAL CHARACTERISTICS DUE TO IMPURITIES AND AN ION IMPLANTATION DEVICE INCLUDING THE SAME

摘要

PURPOSE: An ion generation device and an ion implantation device including the same prevent unwanted metal impurities from being injected into a substrate in which ions are injected by using a cathode including a non-metallic electron emission unit.;CONSTITUTION: An ion generation device includes a filament (120) for thermionic emission and a cathode (130). The cathode includes a first layer and a second layer. The first layer is heated by thermions emitted from the filament. The second layer is partially in contact with the first layer, emits secondary electrons by energy from the first layer, and prevents the emission of materials in the first layer. The first layer includes metallic materials, and the second layer includes non-metallic materials.;COPYRIGHT KIPO 2013