WAFER INSPECTION INTERFACE APPARATUS AND WAFER INSPECTION APPARATUS

摘要

the invention of the challenge, laboratory space while saving alignment mechanism for multiple laboratories from public to would be that the wafer (W), which provides an interface for examination. Interface for the wafer (W) check of the present invention (IF) is, the probe card 19 and the wafer (W) suction device for adsorbing the probe card 19 (20), the probe card 19 is adsorbed and a seal member 21 for adsorbing the wafer, a fixing ring for fixing (23) for the seal member for the wafer adsorption (21), the card holder 22, and the suction means 20 and exhaust means, and the right end in the closed space is opened and the first air passage is opened at the left end fixed ringcheuk (19C) and the right end is opened to face the opening of the left end of the first air passage (19C) connecting the left end and the exhaust means and a second air passage and (23A), a first (19C) and a hole communicating the second air passage (23A) (21A) which is open to the vent. ;