INTERFACE STRUCTURE OF A WAFER INSPECTION APPARATUS, CAPABLE OF STABLY SUPPLYING POWER FOR THE WAFER INSPECTION APPARATUS

摘要

PURPOSE: The interface structure of a wafer inspection apparatus is provided to obtain the transmission property of a general signal line during a wafer inspection process by reducing the weight and the size of the probe card.;CONSTITUTION: A performance board(300) is connected to a test head. An universal block printed circuit board(400) is directly connected with a general signal line and divides a power signal line in numbers. A probe card(100) installs a ceramic multi-layered substrate on the lower side of an interposer. Probes are arranged on the ceramic multi-layered substrate.;COPYRIGHT KIPO 2010