WAFER INSPECTION INTERFACE CAPABLE OF MAINTAINING THE FLATNESS OF THE OPPOSITE SURFACE OF A WAFER AND A WAFER INSPECTION APPARATUS

摘要

PURPOSE: A wafer inspection interface and a wafer inspection apparatus are provided to easily adjust the thickness of a probe card by installing a spacer on the contact surface of a frame.;CONSTITUTION: A probe card (20) includes probes. The probe corresponds to the electrode of a semiconductor device. A frame supports the probe card. A spacer (51) is formed on the contact surface of the frame. The spacer adjusts the thickness of the probe card.;COPYRIGHT KIPO 2013