Photodetectors based on wurtzite MgZnO

摘要

A photodetector (PD) includes a substrate, and a ZnO nucleation layer on the substrate. A wurtzite Mg_xZn_1-xO layer is on the ZnO nucleation layer, wherein x is a mole fraction between 0 and 0.62. A level of crystallinity of the wurtzite Mg_xZn_1-xO layer characterized by x-ray diffraction with a deconvolution of a triple-crystal ω rocking curve of a ZnO (0002) peak has a narrow component with a full width at half maximum (FWHM) less than or equal to (≦) 20 arc/s. First and second spaced apart electrodes are on a surface of the wurtzite Mg_xZn_1-xO layer. The mole fraction x can be between 0.20 and 0.46, including between 0.37 and 0.46, and provide a PD responsivity of at least 20 A/W at 5V in the solar blind region from 200 nm to 290 nm.