首页> 中文期刊>半导体学报:英文版 >High-operating-temperature MWIR photodetector based on a InAs/GaSb superlattice grown by MOCVD

High-operating-temperature MWIR photodetector based on a InAs/GaSb superlattice grown by MOCVD

     

摘要

We demonstrate a high-operating-temperature(HOT)mid-wavelength InAs/GaSb superlattice heterojunction in-frared photodetector grown by metal-organic chemical vapor deposition.High crystalline quality and the near-zero lattice mis-match of a InAs/GaSb superlattice on an InAs substrate were evidenced by high-resolution X-ray diffraction.At a bias voltage of-0.1 V and an operating temperature of 200 K,the device exhibited a 50%cutoff wavelength of~4.9μm,a dark current dens-ity of 0.012 A/cm^(2),and a peak specific detectivity of 2.3×10^(9) cm·Hz^(1/2)/W.

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