STEAM SUPPLY DEVICE, STEAM DRYING DEVICE, STEAM SUPPLY METHOD AND STEAM DRYING METHOD

摘要

PROBLEM TO BE SOLVED: To solve such a problem that, in steam drying of a substrate having a fine pattern formed thereon, prevention of pattern collapse due to moisture contained in an original IPA to be stored is a problem.SOLUTION: A recycling and dehydrating means 30 is connected to a storage unit 11 itself, a mixed liquid of an IPA and water is supplied to the storage unit 11 from a mixed liquid supply source via a pipeline 12, and then moisture is removed from the mixed liquid in the storage unit 11 by a dehydrating section 33. Then, the IPA in the storage section 11 is vaporized to be supplied to a substrate processing section 90. Thus, the concentration of moisture contained in an original IPA to be stored can be reduced, so that pattern collapse can be minimized.SELECTED DRAWING: Figure 1