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Method for transferring a layer from a donor substrate onto a handle substrate
Method for transferring a layer from a donor substrate onto a handle substrate
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机译:将层从供体衬底转移到处理衬底上的方法
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摘要
the present invention is a method for delivering a layer from a donor substrate onto a handle substrate, after separation, the remainder of the donor substrate is reused. Due to the geometric characteristics of the binary carved substrate, in order to remove undesired protruding edge regions that do, the invention proposes to perform an additional etching process before the separation occurs. ;
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