ROLL-TO-ROLL TYPE VACUUM DEPOSITION SYSTEM AND VACUUM DEPOSITION METHOD

摘要

PROBLEM TO BE SOLVED: To provide a vacuum deposition method capable of securely reducing a splash and also suppressing a deposition material from decreasing in effective use rate, and a vacuum deposition device capable of implementing the same.;SOLUTION: The present invention relates to a roll-to-roll type vacuum deposition device 10 comprising: an evaporation source 1 for generating a vacuum deposition flux 3 by evaporating a vacuum deposition material; a film formation roller 4 supporting a base material film 8 and receiving the vacuum deposition flux 3 thereupon to form a thin film; and a shield plate 6 for blocking part of the vacuum deposition flux 3 between the evaporation source 1 and the film formation roller 4, the roll-to-roll type vacuum deposition device 10 being characterized in that the evaporation source 1 is installed at evaporation source driving means 2 of driving the evaporation source 1 and varying the distance to the film formation roller 4, and the shield plate 6 is installed at shield plate driving means 7 of driving the shield plate 6 and varying the area by which the vacuum deposition flux is blocked.;SELECTED DRAWING: Figure 1;COPYRIGHT: (C)2017,JPO&INPIT