Elemental and phase analysis of nanocomposite coatings on basis Ti-Hf-Si-N system received by the vacuum-arc deposition method

摘要

Coatings on the basis Ti-Hf-Si-N system were synthesized by vacuum-arc deposition method fromud the uniflow and separated ion-plasma flow. The morphology, elemental and phase composition ofud coatings were investigated. The dependence of the characteristics of the coating from the physicalud and technological parameters of deposition was installed. The two-phase structure of the coating: aud substitutional solution (Ti, Hf)N and quasiamorphous silikonitrid α-Si₃N₄ was determined. The factorsud that determine the compressive stresses in the coatings were considered.