PARTS FOR VACUUM FILM DEPOSITION SYSTEM, VACUUM FILM DEPOSITION SYSTEM USING THE SAME, TARGET DEVICE, AND VACUUM FILM DEPOSITION METHOD

摘要

PROBLEM TO BE SOLVED: To stably and effectively prevent the peel-off of a film deposition material adhering to parts for vacuum film deposition system, a target, and a backing plate during a film deposition process, the peel-off of a sprayed deposit itself, and further the falling of particles from a deposit and also to suppress the increase in film deposition cost attendant on cleaning, or the like.;SOLUTION: The parts for vacuum film deposition system have a base material for parts and a sprayed deposit formed on the surface of the base material for parts, and further, the sprayed deposit has a basic film composition A at a place adjacent to the surface part of the base material and a basic film composition B in the surface part of the sprayed deposit and also has a gradient composition at least in a part of a space between the basic film composition A and the basic film composition B. The vacuum film deposition system is constituted by applying the above parts for vacuum film deposition system to a film-deposition sample holding part, a film- deposition source holding part, deposition preventing parts, or the like. The target device is constituted by depositing a similar sprayed deposit onto the surface of a noneroded area of the target body and the surface of the backing plate body.;COPYRIGHT: (C)2002,JPO