DEPOSITION PREVENTION PLATE FOR VACUUM FILM FORMING DEVICE, METHOD FOR MANUFACTURING DEPOSITION PREVENTION PLATE FOR VACUUM FILM FORMING DEVICE, VACUUM FILM FORMING DEVICE, AND VACUUM FILM FORMING METHOD

摘要

The purpose of the present invention is to provide a deposition preventing plate for a vacuum film forming device having excellent anti-peeling effect of a film forming material even if deposition is repeated, a method for manufacturing a deposition preventing plate for a vacuum film forming device, a vacuum film forming device, and a vacuum film forming method. According to the present invention, the deposition preventing plate for a vacuum film forming device is capable of preventing a film forming material from being attached to the unnecessary position. Moreover, the present invention provides the deposition preventing plate for a vacuum film forming device consisting of aluminum, having the surface with a concave-convex structure with a concave part whose average opening diameter is 0.01-9 m, where multiple protruding parts whose average height is 30-1000 m are arranged on the surface, where the average density of the protruding part is 10/100 mm^2 or more, and where the ratio of the lower area of the protruding part is more than 90% with respect to the 100 mm^2 area.