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Conference on Device and Process Technologies for Microelectronics, MEMS, and Photonics

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1.Carbon-nanotube-based nanoelectromechanical switch

机译：基于碳纳米管的纳米机电开关
- 作者：Jeong Won Kang;Ki Ryang Byun;Ki Oh Song;Ho Jung Hwang;SPIE-The International Society for Optical Engineering;Queensland University of Technology(AU);Air Force Office of Scientific Research Asian Office of Aerospace Research and Development(JP)
- 会议名称：《Conference on Device and Process Technologies for Microelectronics, MEMS, and Photonics》 | 2006年
- nanoelectromechanical memory;
- NEMS;
- NRAM;
- carbon nanotube;
- molecular dynamics;
2.Polymer microlens with independent control of radius and focal length for an imaging fiber

机译：聚合物微透镜，具有独立控制半径和成像纤维的焦距
- 作者：Mohammed Ashraf;Franck Chollet;Murukeshan Matham;Chun Yang
- 会议名称：《Conference on Device and Process Technologies for Microelectronics, MEMS, and Photonics》 | 2006年
- Reflow;
- polymer;
- microlens;
- biomedical application;
- microfabrication;
- focal length;
- PR(Photoresist);
3.Thermal and mechanical responses of the thermomechanical microprobe for high-density storage technology

机译：热机械微探针的热和机械响应，用于高密度存储技术
- 作者：Chun-Te Lin;Kuo-Ning Chiang
- 会议名称：《Conference on Device and Process Technologies for Microelectronics, MEMS, and Photonics》 | 2006年
- Transient heat transfer;
- finite element method;
- Doping;
- Area weightin method;
- Resistivity;
- Resistivity heater;
4.Patterning frictional differentiation to a polymer surface by atomic force microscopy

机译：用原子力显微镜图案化摩擦分化与聚合物表面
- 作者：Gregory S. Watson;Christopher L. Brown;Sverre Myhra;Nicolas C. Roch;Simon Hu;Jolanta A. Watson
- 会议名称：《Conference on Device and Process Technologies for Microelectronics, MEMS, and Photonics》 | 2006年
- Atomic force microscopy;
- PDMS;
- Stick-Slip;
- Polymer;
- Friction;
- Manipulation;
5.'Patterning' frictional differentiation to a polymer surface by atomic force microscopy

机译：用原子力显微镜将聚合物表面的“图案化”摩擦分化
- 作者：Gregory S. Watson;Christopher L. Brown;Sverre Myhra;Nicolas C. Roch;Simon Hu;Jolanta A. Watson;SPIE-The International Society for Optical Engineering;Queensland University of Technology(AU);Air Force Office of Scientific Research Asian Office of Aerospace Research and Development(JP)
- 会议名称：《Conference on Device and Process Technologies for Microelectronics, MEMS, and Photonics》 | 2006年
- atomic force microscopy;
- PDMS;
- stick-slip;
- polymer;
- friction;
- manipulation;
6.Modelling of sacrificial spin-on glass (SOG) etching in non-straight microchannels using hydrofluoric acid

机译：使用氢氟酸在非直微通道中蚀刻牺牲旋转玻璃（SOG）蚀刻的建模
- 作者：Azrul Azlan Hamzah;Burhanuddin Yeop Majlis;Ibrahim Ahmad;SPIE-The International Society for Optical Engineering;Queensland University of Technology(AU);Air Force Office of Scientific Research Asian Office of Aerospace Research and Development(JP)
- 会议名称：《Conference on Device and Process Technologies for Microelectronics, MEMS, and Photonics》 | 2006年
- spin-on glass (SOG);
- HF etch;
- microchannels;
- etching model;
- sacrificial layer;
7.Polymer microlens with independent control of radius and focal length for an imaging fiber

机译：聚合物微透镜，具有独立控制半径和成像纤维的焦距
- 作者：Ashraf Mohammed;Chollet Franck;Matham Murukeshan;Yang Chun;SPIE-The International Society for Optical Engineering;Queensland University of Technology(AU);Air Force Office of Scientific Research Asian Office of Aerospace Research and Development(JP)
- 会议名称：《Conference on Device and Process Technologies for Microelectronics, MEMS, and Photonics》 | 2006年
- reflow;
- polymer;
- microlens;
- biomedical application;
- microfabrication;
- focal length;
- PR (photoresist);
8.Formation of thick spin-on glass (SOG) sacrificial layer for capacitive accelerometer encapsulation

机译：用于电容式加速度计封装的厚旋转玻璃（SOG）牺牲层的形成
- 作者：Azrul A. Hamzah;Burhanuddin Y. Majlis;Ibrahim Ahmad
- 会议名称：《Conference on Device and Process Technologies for Microelectronics, MEMS, and Photonics》 | 2006年
- Spin-on glass(SOG);
- sacrificial layer;
- HF etch;
- encapsulation;
- accelerometer;
9.Carbon-nanotube-based nanoelectromechanical switch

机译：基于碳纳米管的纳米机电开关
- 作者：Jeong Won Kang;Ki Ryang Byun;Ki Oh Song;Ho Jung Hwang
- 会议名称：《Conference on Device and Process Technologies for Microelectronics, MEMS, and Photonics》 | 2006年
- Nanoelectromechanical memory;
- NEMS;
- NRAM;
- Carbon Nanotube;
- Molecular Dynamics;
10.Formation of thick spin-on glass (SOG) sacrificial layer for capacitive accelerometer encapsulation

机译：用于电容式加速度计封装的厚旋转玻璃（SOG）牺牲层的形成
- 作者：Azrul Azlan Hamzah;Burhanuddin Yeop Majlis;Ibrahim Ahmad;SPIE-The International Society for Optical Engineering;Queensland University of Technology(AU);Air Force Office of Scientific Research Asian Office of Aerospace Research and Development(JP)
- 会议名称：《Conference on Device and Process Technologies for Microelectronics, MEMS, and Photonics》 | 2006年
- spin-on glass (SOG);
- sacrificial layer;
- HF etch;
- encapsulation;
- accelerometer;
11.Modelling of sacrificial spin-on glass (SOG) etching in non-straight microchannels using hydrofluoric acid

机译：使用氢氟酸在非直微通道中蚀刻牺牲旋转玻璃（SOG）蚀刻的建模
- 作者：Azrul A. Hamzah;Burhanuddin Y. Majlis;Ibrahim Ahmad
- 会议名称：《Conference on Device and Process Technologies for Microelectronics, MEMS, and Photonics》 | 2006年
- Spin-on glass (SOG);
- HF etch;
- microchannels;
- etching model;
- sacrificial layer;
12.Thermal and Mechanical Responses of the Thermomechanical Microprobe for High-Density Storage Technology

机译：热机械微探针的热和机械响应，用于高密度存储技术
- 作者：Chun-Te Lin;Kuo-Ning Chiang;SPIE-The International Society for Optical Engineering;Queensland University of Technology(AU);Air Force Office of Scientific Research Asian Office of Aerospace Research and Development(JP)
- 会议名称：《Conference on Device and Process Technologies for Microelectronics, MEMS, and Photonics》 | 2006年
- transient heat transfer;
- finite element method;
- doping;
- area weighting method;
- resistivity;
- resistivity heater;
13.I-V response of a two-terminal nanodevice using tight-binding theory

机译：使用紧密绑定理论的双终端纳米纳米的I-V响应
- 作者：A. Alexopoulos
- 会议名称：《Conference on Device and Process Technologies for Microelectronics, MEMS, and Photonics》 | 2006年
- Green's functions;
- Atomic device;
- STM;
- Transfer matrix method;
- Tight-binding theory;
14.Advanced simulation for shape-prediction of microstructures fabricated by PCT technique

机译：PCT技术制造的微结构形状预测的先进仿真
- 作者：M. Horade;S. Khumpuang;K. Fujioka;S. Sugiyama;SPIE-The International Society for Optical Engineering;Queensland University of Technology(AU);Air Force Office of Scientific Research Asian Office of Aerospace Research and Development(JP)
- 会议名称：《Conference on Device and Process Technologies for Microelectronics, MEMS, and Photonics》 | 2006年
- synchrotron radiation lithography;
- microstructure;
- PMMA;
15.Development of micro motion sensors based on piezoresistive and thermo-resistive effects in silicon

机译：基于压阻和硅的热阻效应的微观运动传感器的开发
- 作者：Dzung V. Dao;Van T. Dau;Tatsuo Shiozawa;Hideo Kumagai;Susumu Sugiyama
- 会议名称：《Conference on Device and Process Technologies for Microelectronics, MEMS, and Photonics》 | 2006年
- Piezoresistive;
- Thermo-resistive;
- Accelerometer;
- Gyroscope;
- Motion sensors;
- MEMS Technology;
16.Ⅰ-Ⅴ response of a two-terminal nanodevice using tight-binding theory

机译：Ⅰ-α使用紧密绑定理论的双终端纳米型响应
- 作者：A. Alexopoulos;SPIE-The International Society for Optical Engineering;Queensland University of Technology(AU);Air Force Office of Scientific Research Asian Office of Aerospace Research and Development(JP)
- 会议名称：《Conference on Device and Process Technologies for Microelectronics, MEMS, and Photonics》 | 2006年
- green's functions;
- atomic device;
- STM;
- transfer matrix method;
- tight-binding theory;
17.Characterization of deep wet etching of glass

机译：玻璃深湿蚀刻的特征
- 作者：Ciprian Iliescu;Bangtao Chen;Francis E. Tay;Guolin Xu;Jianmin Miao
- 会议名称：《Conference on Device and Process Technologies for Microelectronics, MEMS, and Photonics》 | 2006年
- wet etching of glass;
- masking layers;
- etch rate;
18.Design and implementation issues for ceramic substrate micro RF relay switches for re-configurable antennas

机译：用于可重新配置天线的陶瓷基板微射频继电器开关的设计与实现问题
- 作者：Michael Parker;Jason Chaffey;SPIE-The International Society for Optical Engineering;Queensland University of Technology(AU);Air Force Office of Scientific Research Asian Office of Aerospace Research and Development(JP)
- 会议名称：《Conference on Device and Process Technologies for Microelectronics, MEMS, and Photonics》 | 2006年
19.RF magnetron sputter deposition and analysis of strontium-doped lead zirconate titanate thin films

机译：RF磁控溅射沉积和锶掺杂锆钛晶薄膜的分析
- 作者：Sharath Sriram;Madhu Bhaskaran;Anthony S. Holland;Ernest Fardin;Kandasamy
- 会议名称：《Conference on Device and Process Technologies for Microelectronics, MEMS, and Photonics》 | 2006年
- RF magnetron sputtering;
- peovskite;
- PSZT;
- piezoelectric;
- ferroelectric;
20.Combinatorial deposition by r.f. magnetron sputtering using subdivided powder targets as new development method for thin-film phosphors

机译：r.f的组合沉积。磁控溅射使用细分粉末靶作为薄膜磷光体的新开发方法
- 作者：Toshihiro Miyata;Yuu Mochizuki;Tadatsugu Minami;SPIE-The International Society for Optical Engineering;Queensland University of Technology(AU);Air Force Office of Scientific Research Asian Office of Aerospace Research and Development(JP)
- 会议名称：《Conference on Device and Process Technologies for Microelectronics, MEMS, and Photonics》 | 2006年
21.Design and implementation issues for ceramic substrate micro RF relay switches for re-configurable antennas

机译：用于可重新配置天线的陶瓷基板微射频继电器开关的设计与实现问题
- 作者：Michael Parker;Jason Chaffey
- 会议名称：《Conference on Device and Process Technologies for Microelectronics, MEMS, and Photonics》 | 2006年
22.Combinatorial deposition by r.f. magnetron sputtering using subdivided powder targets as new development method for thin-film phosphors

机译：r.f的组合沉积。磁控溅射使用细分粉末靶作为薄膜磷光体的新开发方法
- 作者：Toshihiro Miyata;Yuu Mochizuki;Tadatsugu Minami
- 会议名称：《Conference on Device and Process Technologies for Microelectronics, MEMS, and Photonics》 | 2006年
23.Development of micro motion sensors based on piezoresistive and thermo-resistive effects in silicon

机译：基于压阻和硅的热阻效应的微观运动传感器的开发
- 作者：Dzung V. Dao;Van T. Dau;Tatsuo Shiozawa;Hideo Kumagai;Susumu Sugiyama;SPIE-The International Society for Optical Engineering;Queensland University of Technology(AU);Air Force Office of Scientific Research Asian Office of Aerospace Research and Development(JP)
- 会议名称：《Conference on Device and Process Technologies for Microelectronics, MEMS, and Photonics》 | 2006年
- piezoresistive;
- thermo-resistive;
- accelerometer;
- gyroscope;
- motion sensors;
- MEMS technology;
24.RF magnetron sputter deposition and analysis of strontium-doped lead zirconate titanate thin films

机译：RF磁控溅射沉积和锶掺杂锆钛晶薄膜的分析
- 作者：Sharath Sriram;Madhu Bhaskaran;Anthony S. Holland;Ernest Fardin;Sasikaran Kandasamy;SPIE-The International Society for Optical Engineering;Queensland University of Technology(AU);Air Force Office of Scientific Research Asian Office of Aerospace Research and Development(JP)
- 会议名称：《Conference on Device and Process Technologies for Microelectronics, MEMS, and Photonics》 | 2006年
- RF magnetron sputtering;
- perovskite;
- PSZT;
- piezoelectric;
- ferroelectric;
25.Characterization of deep wet etching of glass

机译：玻璃深湿蚀刻的特征
- 作者：Ciprian Iliescu;Bangtao Chen;Francis E.H. Tay;Guolin Xu;Jianmin Miao;SPIE-The International Society for Optical Engineering;Queensland University of Technology(AU);Air Force Office of Scientific Research Asian Office of Aerospace Research and Development(JP)
- 会议名称：《Conference on Device and Process Technologies for Microelectronics, MEMS, and Photonics》 | 2006年
- wet etching of glass;
- masking layers;
- etch rate;
26.Advanced simulation for shape-prediction of microstructures fabricated by PCT technique

机译：PCT技术制造的微结构形状预测的先进仿真
- 作者：M. Horade;S. Khumpuang;K. Fujioka;S. Sugiyama
- 会议名称：《Conference on Device and Process Technologies for Microelectronics, MEMS, and Photonics》 | 2006年
- Synchrotron Radiation lithography;
- microstructure;
- PMMA;
27.Deep-UV LEDs: Physics, Performance and Applications

机译：深紫色LED：物理，性能和应用
- 作者：R. Gaska;J. Zhang;SPIE-The International Society for Optical Engineering;Queensland University of Technology(AU);Air Force Office of Scientific Research Asian Office of Aerospace Research and Development(JP)
- 会议名称：《Conference on Device and Process Technologies for Microelectronics, MEMS, and Photonics》 | 2006年
- III-nitrides;
- AlGaN;
- AlInGaN;
- ultraviolet LEDs;
- fluorescence;
- UV sensors;
28.Deep-UV LEDs: physics, performance, and applications

机译：深紫色LED：物理，性能和应用
- 作者：R. Gaska;J. Zhang
- 会议名称：《Conference on Device and Process Technologies for Microelectronics, MEMS, and Photonics》 | 2006年
- III-Nitrides;
- AlGaN;
- AIInGaN;
- ultraviolet LEDs;
- fluorescence;
- UV sensors;
29.Nanosieves fabricated by interference lithography and electroforming

机译：纳米孔由干扰光刻和电铸造
- 作者：Luis E. Gutierrez-Rivera;Edson J. de Carvalho;Maria A. da Silva;Lucila Cescato
- 会议名称：《Conference on Device and Process Technologies for Microelectronics, MEMS, and Photonics》 | 2006年
- sieves;
- electroplating;
- interference lithography;
- photolithography;
- membranes;
30.Nitrogen Ion Implantation and Characterization of Tungsten Oxide Films

机译：氮离子植入与氧化钨膜的表征
- 作者：T. Tesfamichael;J. M. Bell;SPIE-The International Society for Optical Engineering;Queensland University of Technology(AU);Air Force Office of Scientific Research Asian Office of Aerospace Research and Development(JP)
- 会议名称：《Conference on Device and Process Technologies for Microelectronics, MEMS, and Photonics》 | 2006年
- tungsten oxide;
- nitrogen ion implantation;
- optical properties;
- microscopic structure;
- nitrogen depth profile;
31.Optical Applications of Marine DNA

机译：海洋DNA的光学应用
- 作者：Kanji Yamaoka;Masahiro Wada;Yoshiharu Kagami;Junichi Yoshida;Naoya Ogata;SPIE-The International Society for Optical Engineering;Queensland University of Technology(AU);Air Force Office of Scientific Research Asian Office of Aerospace Research and Development(JP)
- 会议名称：《Conference on Device and Process Technologies for Microelectronics, MEMS, and Photonics》 | 2006年
32.Preparation of cyanine complex micro-domes in self-organized dewetted films

机译：自组织脱皮薄膜中青色复合微圆形的制备
- 作者：Yuichi Hashimoto;Olaf Karthaus;SPIE-The International Society for Optical Engineering;Queensland University of Technology(AU);Air Force Office of Scientific Research Asian Office of Aerospace Research and Development(JP)
- 会议名称：《Conference on Device and Process Technologies for Microelectronics, MEMS, and Photonics》 | 2006年
- self-organization;
- dewetting;
- micro-dome;
- cyanine-dye complex;
- two dimensional ordered array;
33.Preparation of cyanine complex micro-domes in self-organized dewetted films

机译：自组织脱皮薄膜中青色复合微圆形的制备
- 作者：Yuichi Hashimoto;Olaf Karthaus
- 会议名称：《Conference on Device and Process Technologies for Microelectronics, MEMS, and Photonics》 | 2006年
- self-organization;
- dewetting;
- micro-dome;
- cyanine-dey complex;
- two dimensional ordered array;
34.Enhancement of scattering and light-extraction by metal particles on silicon waveguides

机译：硅波导金属颗粒的增强散射和光采
- 作者：K.R. Catchpole;S. Pillai;SPIE-The International Society for Optical Engineering;Queensland University of Technology(AU);Air Force Office of Scientific Research Asian Office of Aerospace Research and Development(JP)
- 会议名称：《Conference on Device and Process Technologies for Microelectronics, MEMS, and Photonics》 | 2006年
- surface plasmon;
- SOI;
- LED;
- electroluminescence;
- nanoparticle;
35.Tunable natural nano-arrays: controlling surface properties and light reflectance

机译：可调天然纳米阵列：控制表面性能和光反射率
- 作者：Jolanta A. Watson;Sverre Myhra;Gregory S. Watson
- 会议名称：《Conference on Device and Process Technologies for Microelectronics, MEMS, and Photonics》 | 2006年
- Cicada;
- Anfireflective;
- Manipulation;
- Nanostructrues;
- Atomic force microscopy;
36.Coating materials and particle size effect of nano- and micro-sized iron powder composites

机译：纳米和微尺寸铁粉复合材料的涂料和粒度效应
- 作者：Bok-Ki Min;In-Sung Kim;Soon-Jong Jeong;Jae-Sung Song;SPIE-The International Society for Optical Engineering;Queensland University of Technology(AU);Air Force Office of Scientific Research Asian Office of Aerospace Research and Development(JP)
- 会议名称：《Conference on Device and Process Technologies for Microelectronics, MEMS, and Photonics》 | 2006年
- iron powder;
- powder metallurgy;
- magnetic core;
- core loss;
- permeability;
- green density;
- electrical resistivity;
- soft magnetic;
- organic insulation coating;
37.Nanosieves Fabricated by Interference Lithography and Electroforming

机译：纳米孔由干扰光刻和电铸造
- 作者：Luis E. Gutierrez-Rivera;Edson J. de Carvalho;Maria A. da Silva;Lucila Cescato;SPIE-The International Society for Optical Engineering;Queensland University of Technology(AU);Air Force Office of Scientific Research Asian Office of Aerospace Research and Development(JP)
- 会议名称：《Conference on Device and Process Technologies for Microelectronics, MEMS, and Photonics》 | 2006年
- sieves;
- electroplating;
- interference lithography;
- photolithography;
- membranes;
38.Ion beam synthesis of WC-SiC nanocomposite thin layers and their electron field emission properties

机译：WC-SiC纳米复合薄层的离子束合成及其电子场发射性能
- 作者：W. M. Tsang;S. P. Wong;J. K. N. Lindner
- 会议名称：《Conference on Device and Process Technologies for Microelectronics, MEMS, and Photonics》 | 2006年
- WC;
- SiC;
- field emission;
- nanocompostites;
- internal quantum tunneling;
- proximity field enhancement;
39.Lithography of diamond-like-carbon (DLC) films for use as masters in soft-lithography

机译：金刚石碳（DLC）薄膜的光刻用作软光刻的主动物
- 作者：Gregory S. Watson;Sverre Myhra;Jolanta A. Watson;SPIE-The International Society for Optical Engineering;Queensland University of Technology(AU);Air Force Office of Scientific Research Asian Office of Aerospace Research and Development(JP)
- 会议名称：《Conference on Device and Process Technologies for Microelectronics, MEMS, and Photonics》 | 2006年
- atomic force microscopy;
- PDMS;
- stamps;
- DLC;
- Diamond-like-carbon;
40.Optical applications of marine DNA

机译：海洋DNA的光学应用
- 作者：Kanji Yamaoka;Masahiro Wada;Yoshiharu Kagami;Junichi Yoshida;Naoya Ogata
- 会议名称：《Conference on Device and Process Technologies for Microelectronics, MEMS, and Photonics》 | 2006年
41.Nitrogen ion implantation and characterization of tungsten oxide films

机译：氮离子植入与氧化钨膜的表征
- 作者：T. Tesfamichael;J. M. Bell
- 会议名称：《Conference on Device and Process Technologies for Microelectronics, MEMS, and Photonics》 | 2006年
- Tungsten oxide;
- Nitrogen ion implantation;
- Optical properties;
- Microscopic structure;
- Nitrogen depth profile;
42.Lithography of diamond-like-carbon (DLC) films for use as masters in soft-lithography

机译：金刚石碳（DLC）薄膜的光刻用作软光刻的主动物
- 作者：Gregory S. Watson;Sverre Myhra;Jolanta A. Watson
- 会议名称：《Conference on Device and Process Technologies for Microelectronics, MEMS, and Photonics》 | 2006年
- Atomic force microscopy;
- PDMS;
- stamps;
- DLC;
- Diamond-like-Carbon;
43.Nanoparticle manipulation in plasma-assisted nanofabrication of electron field emitters based on single crystalline carbon nanotip patterns

机译：基于单晶碳纳米坡图案的电子场发射器等离子体辅助纳米型纳米粒子操纵
- 作者：Paul P. Rutkevych;Kostya (Ken) Ostrikov;Shuyan Xu
- 会议名称：《Conference on Device and Process Technologies for Microelectronics, MEMS, and Photonics》 | 2006年
- Nanoparticle;
- carbon microemitter;
- nanomanipulation;
- plasma-aided nanofabrication;
- thermophoretic force;
44.Tunable Natural Nano-Arrays: Controlling Surface Properties and Light Reflectance

机译：可调天然纳米阵列：控制表面性能和光反射率
- 作者：Jolanta A. Watson;Sverre Myhra;Gregory S. Watson;SPIE-The International Society for Optical Engineering;Queensland University of Technology(AU);Air Force Office of Scientific Research Asian Office of Aerospace Research and Development(JP)
- 会议名称：《Conference on Device and Process Technologies for Microelectronics, MEMS, and Photonics》 | 2006年
- cicada;
- antireflective;
- manipulation;
- nanostructures;
- atomic force microscopy;
45.Nanoparticle manipulation in plasma-assisted nanofabrication of electron field emitters based on single crystalline carbon nanotip patterns

机译：基于单晶碳纳米坡图案的电子场发射器等离子体辅助纳米型纳米粒子操纵
- 作者：Paul P. Rutkevych;Kostya (Ken) Ostrikov;Shuyan Xu;SPIE-The International Society for Optical Engineering;Queensland University of Technology(AU);Air Force Office of Scientific Research Asian Office of Aerospace Research and Development(JP)
- 会议名称：《Conference on Device and Process Technologies for Microelectronics, MEMS, and Photonics》 | 2006年
- nanoparticle;
- carbon microemitter;
- nanomanipulation;
- plasma-aided nanofabrication;
- thermophoretic force;
46.Coating materials and particle size effect of nano- and micro-sized iron powder composites

机译：纳米和微尺寸铁粉复合材料的涂料和粒度效应
- 作者：Bok-Ki Min;In-Sung Kim;Soon-Jong Jeong;Jae-Sung Song
- 会议名称：《Conference on Device and Process Technologies for Microelectronics, MEMS, and Photonics》 | 2006年
- Iron powder;
- powder metallurgy;
- magnetic core;
- core loss;
- permeability;
- green density;
- electrical resistivity;
- soft magnetic;
- organic insulation coationg;
47.Ion beam synthesis of WC-SiC nanocomposite thin layers and their electron field emission properties

机译：WC-SiC纳米复合薄层的离子束合成及其电子场发射性能
- 作者：W.M. Tsang;S.P. Wong;J.K.N. Lindner;SPIE-The International Society for Optical Engineering;Queensland University of Technology(AU);Air Force Office of Scientific Research Asian Office of Aerospace Research and Development(JP)
- 会议名称：《Conference on Device and Process Technologies for Microelectronics, MEMS, and Photonics》 | 2006年
- WC;
- SiC;
- field emission;
- nanocomposites;
- internal quantum tunneling;
- proximity field enhancement;
48.Enhancement of scattering and light-extraction by metal particles on silicon waveguides

机译：硅波导金属颗粒的增强散射和光采
- 作者：K. R. Catchpole;S. Pillai
- 会议名称：《Conference on Device and Process Technologies for Microelectronics, MEMS, and Photonics》 | 2006年
- surface plasmon;
- SOI;
- LED;
- electroluminescence;
- nanoparticle;
49.μ-Device fabrication and packaging below 300°C utilizing plasma-assisted wafer-to-wafer bonding

机译：利用等离子体辅助晶片到晶片键合在300°C以下300°C以下的μ - 器件制造和包装
- 作者：Herwig Kirchberger;Rainer Pelzer;Sharon Farrens
- 会议名称：《Conference on Device and Process Technologies for Microelectronics, MEMS, and Photonics》 | 2006年
50.μ-Device Fabrication and Packaging below 300°C utilizing Plasma-assisted Wafer-to-wafer Bonding

机译：利用等离子体辅助晶片到晶片键合在300°C以下300°C以下的μ - 器件制造和包装
- 作者：Herwig Kirchberger;Rainer Pelzer;Sharon Farrens;SPIE-The International Society for Optical Engineering;Queensland University of Technology(AU);Air Force Office of Scientific Research Asian Office of Aerospace Research and Development(JP)
- 会议名称：《Conference on Device and Process Technologies for Microelectronics, MEMS, and Photonics》 | 2006年
51.A new empirical model for heterojunction phototransistors

机译：异质结透光器的新经验模型
- 作者：Liu Hongwei;Niu Pingjuan;Guo Weilian;SPIE-The International Society for Optical Engineering;Queensland University of Technology(AU);Air Force Office of Scientific Research Asian Office of Aerospace Research and Development(JP)
- 会议名称：《Conference on Device and Process Technologies for Microelectronics, MEMS, and Photonics》 | 2006年
- heterojunction phototransistors;
- empirical model;
- optical current;
52.A new empirical model for heterojunction phototransistors

机译：异质结透光器的新经验模型
- 作者：Hongwei Liu;Pingjuan Niu;Weilian Guo
- 会议名称：《Conference on Device and Process Technologies for Microelectronics, MEMS, and Photonics》 | 2006年
- heterojunction phototransistors;
- empirical model;
- optical current;
53.Effects of dielectric overcoating on the absorption enhancement of SOI LEDs with metal island films

机译：电介质外涂对金属岛薄膜吸收增强的影响
- 作者：S. Piliai;K.R. Catchpole;T. Trupke;G. Zhang;J. Zhao;M.A. Green;SPIE-The International Society for Optical Engineering;Queensland University of Technology(AU);Air Force Office of Scientific Research Asian Office of Aerospace Research and Development(JP)
- 会议名称：《Conference on Device and Process Technologies for Microelectronics, MEMS, and Photonics》 | 2006年
- surface plasmons;
- electroluminescence;
- silicon-on-insulator;
- light emitting diodes;
54.Influence of dispersed carbon nanotubes on the optical and structural properties of a conjugated polymer

机译：分散碳纳米管对共轭聚合物的光学和结构性能的影响
- 作者：Roland G. S. Goh;Eric R. Waclawik;Nunzio Motta;John M. Bell;SPIE-The International Society for Optical Engineering;Queensland University of Technology(AU);Air Force Office of Scientific Research Asian Office of Aerospace Research and Development(JP)
- 会议名称：《Conference on Device and Process Technologies for Microelectronics, MEMS, and Photonics》 | 2006年
- optical absorption;
- carbon nanotubes;
- poly(3hexylthiophene);
- interchain interactions;
- scanning tunneling microscopy;
55.Nanocontact printing of nonplanar substrate by using flexible h-PDMS stamp

机译：使用柔性H-PDMS印章纳米接触非平面衬底印刷
- 作者：Jeongdai Jo;Kwang-Young Kim;Eung-Sug Lee;Byung-Oh Choi
- 会议名称：《Conference on Device and Process Technologies for Microelectronics, MEMS, and Photonics》 | 2006年
- Nanocontact printing;
- Non-planar contact printing;
- s-PDMS stamp;
- h-PDMS stamp;
- SAM;
- Sotflithography;
56.Influence of dispersed carbon nanotubes on the optical and structural properties of a conjugated polymer

机译：分散碳纳米管对共轭聚合物的光学和结构性能的影响
- 作者：Roland G. Goh;Eric R. Waclawik;Nunzio Motta;John M. Bell
- 会议名称：《Conference on Device and Process Technologies for Microelectronics, MEMS, and Photonics》 | 2006年
- optical absorption;
- carbon nanotubes;
- poly(3hexylthiophene);
- interchain interactions;
- scanning tunneling microscopy;
57.Electrical and optical properties of VO2 thin films affected by preparation process

机译：通过制备过程影响的VO2薄膜的电气和光学性质
- 作者：Jie He;Li-bin Lin;Yong Lu;Tie-cheng Lu;Zhong-hua Liu;Jing Wang
- 会议名称：《Conference on Device and Process Technologies for Microelectronics, MEMS, and Photonics》 | 2006年
- VO_2 thin film;
- optical properties;
- electrical properties;
- phase transition;
58.Electrical and optical properties of VO_2 thin films affected by preparation process

机译：受制备过程影响的VO_2薄膜的电气和光学性质
- 作者：Jie He;Li-bin Lin;Yong Lu;Tie-cheng Lu;Zhong-hua liu;Jing Wang;SPIE-The International Society for Optical Engineering;Queensland University of Technology(AU);Air Force Office of Scientific Research Asian Office of Aerospace Research and Development(JP)
- 会议名称：《Conference on Device and Process Technologies for Microelectronics, MEMS, and Photonics》 | 2006年
- VO_2 thin film;
- optical properties;
- electrical properties;
- phase transition;
59.Effects of dielectric overcoating on the absorption enhancement of SOI LEDs with metal island films

机译：电介质外涂对金属岛薄膜吸收增强的影响
- 作者：S. Pillai;K. R. Catchpole;T. Trupke;G. Zhang;J. Zhao;M. A. Green
- 会议名称：《Conference on Device and Process Technologies for Microelectronics, MEMS, and Photonics》 | 2006年
- Surface plasmons;
- Electroluminescence;
- Silicon-on-insulator;
- Light Emitting Diodes;
60.Nanocontact Printing of Non-planar Substrate by using Flexible h-PDMS Stamp

机译：使用柔性H-PDMS印章纳米接触非平面基材印花
- 作者：Jeongdai Jo;Kwang-Young Kim;Eung-Sug Lee;Byung-Oh Choi;SPIE-The International Society for Optical Engineering;Queensland University of Technology(AU);Air Force Office of Scientific Research Asian Office of Aerospace Research and Development(JP)
- 会议名称：《Conference on Device and Process Technologies for Microelectronics, MEMS, and Photonics》 | 2006年
- nanocontact printing;
- non-planar contact printing;
- s-PDMS stamp;
- h-PDMS stamp;
- SAM;
- softlithography;
61.Process optimisation for compact, high aspect ratio SU-8 microstructures using x-ray lithography

机译：压缩，高纵横比SU-8使用X射线光刻的过程优化
- 作者：K.D. Vora;B.Y.Shew;E.C. Harvey;J. P. Hayes;A.G. Peele;SPIE-The International Society for Optical Engineering;Queensland University of Technology(AU);Air Force Office of Scientific Research Asian Office of Aerospace Research and Development(JP)
- 会议名称：《Conference on Device and Process Technologies for Microelectronics, MEMS, and Photonics》 | 2006年
- x-ray lithography;
- space-to-feature ratio;
- development rate;
- dimensional error;
- taguchi optimisation;
62.Development of fabrication process for shape-control of three-dimensional submicron structure by synchrotron radiation lithography

机译：同步辐射光刻的三维亚微米结构形状控制制造工艺的开发
- 作者：S. Fujinawa;F. Kato;S. Sugiyama;SPIE-The International Society for Optical Engineering;Queensland University of Technology(AU);Air Force Office of Scientific Research Asian Office of Aerospace Research and Development(JP)
- 会议名称：《Conference on Device and Process Technologies for Microelectronics, MEMS, and Photonics》 | 2006年
- synchrotron radiation lithography;
- X-ray lithography;
- sub-micron structure;
63.A Micromachined Hollow Cathode Discharge Device for the Flexible Display

机译：用于柔性显示器的微机械中空阴极放电装置
- 作者：Jeang Su Hwang;Geun Young Kim;Sang Sik Yang;Soo-ghee Oh;SPIE-The International Society for Optical Engineering;Queensland University of Technology(AU);Air Force Office of Scientific Research Asian Office of Aerospace Research and Development(JP)
- 会议名称：《Conference on Device and Process Technologies for Microelectronics, MEMS, and Photonics》 | 2006年
- hollow cathode;
- discharge;
- flexible;
- polymer;
- micromachining;
- microdischarge;
64.Fabrication of submicron three-dimensional structure by plane-pattern to the cross-section transfer method using synchrotron radiation lithography

机译：通过平面图案制备亚微米三维结构与使用同步辐射光刻的截面传递方法
- 作者：Fumiki Kato;Shinya Fujinawa;Makoto Tsudo;Susumu Sugiyama
- 会议名称：《Conference on Device and Process Technologies for Microelectronics, MEMS, and Photonics》 | 2006年
- PCT;
- Synchrotron Radiation Lithography;
- Submicron 3D-structure;
- Fresnel Diffraction;
65.Concept design of a novel tactile probe tip for down scaled 3D CMMs

机译：用于向下缩放3D CMMS的新型触觉探针尖端的概念设计
- 作者：H. Ji;L. X. Kong;H. Y. Hsu;A. B. Wedding;G.C. I. Lin;K. C. Fan
- 会议名称：《Conference on Device and Process Technologies for Microelectronics, MEMS, and Photonics》 | 2006年
- CMMs probe;
- FBG sensor;
- strain distribution;
66.Process optimisation for compact high aspect ratio SU-8 microstructures using x-ray lithography

机译：压实高纵横比SU-8使用X射线光刻的过程优化
- 作者：K. D. Vora;B. Y. Shew;E. C. Harvey;J. P. Hayes;A. G. Peele
- 会议名称：《Conference on Device and Process Technologies for Microelectronics, MEMS, and Photonics》 | 2006年
- x-ray lithography;
- space-to-feature ratio;
- development trate;
- dimensional error;
- Taguchi optimisation;
67.A micromachined hollow cathode discharge device for the flexible display

机译：用于柔性显示器的微机械中空阴极放电装置
- 作者：Jeang Su Hwang;Geun Young Kim;Sang Sik Yang;Soo-ghee Oh
- 会议名称：《Conference on Device and Process Technologies for Microelectronics, MEMS, and Photonics》 | 2006年
- Hollow cathode;
- Discharge;
- Flexible;
- Polymer;
- Micromachining;
- microdischarge;
68.Development of fabrication process for shape-control of three-dimensional submicron structure by synchrotron radiation lithography

机译：同步辐射光刻的三维亚微米结构形状控制制造工艺的开发
- 作者：S. Fujinawa;F. Kato;S. Sugiyama
- 会议名称：《Conference on Device and Process Technologies for Microelectronics, MEMS, and Photonics》 | 2006年
- Synchrotron Radiation lithography;
- X-ray lithography;
- sub-micron structure;
69.Concept design of a novel tactile probe tip for down scaled 3D CMMs

机译：用于向下缩放3D CMMS的新型触觉探针尖端的概念设计
- 作者：Ji H.;Kong L.X.;Hsu H.Y.;Wedding A.B.;Lin G.C.I;SPIE-The International Society for Optical Engineering;Queensland University of Technology(AU);Air Force Office of Scientific Research Asian Office of Aerospace Research and Development(JP)
- 会议名称：《Conference on Device and Process Technologies for Microelectronics, MEMS, and Photonics》 | 2006年
- CMMs probe;
- FBG sensor;
- strain distribution;
70.Silicon dry etching profile control by RIE at room temperature for MEMS applications

机译：硅干蚀刻轮廓通过RIE在室温下对MEMS应用进行控制
- 作者：D. Vrtacnik;D. Resnik;U. Aljancic;M. Mozek;S. Amon;SPIE-The International Society for Optical Engineering;Queensland University of Technology(AU);Air Force Office of Scientific Research Asian Office of Aerospace Research and Development(JP)
- 会议名称：《Conference on Device and Process Technologies for Microelectronics, MEMS, and Photonics》 | 2006年
- reactive ion etching;
- etching rate;
- etching selectivity;
- undercut;
- load;
- aspect ratio dependent etching;
71.Fabrication of submicron three-dimensional structure by plane-pattern to the cross-section transfer method using synchrotron radiation lithography

机译：通过平面图案制备亚微米三维结构与使用同步辐射光刻的截面传递方法
- 作者：Fumiki Kato;Shinya Fujinawa;Makoto Tsudo;Susumu Sugiyama;SPIE-The International Society for Optical Engineering;Queensland University of Technology(AU);Air Force Office of Scientific Research Asian Office of Aerospace Research and Development(JP)
- 会议名称：《Conference on Device and Process Technologies for Microelectronics, MEMS, and Photonics》 | 2006年
- PCT;
- synchrotron radiation lithography;
- submicron 3D-structure;
- fresnel diffraction;
72.Silicon dry etching profile control by RIE at room temperature for MEMS applications

机译：硅干蚀刻轮廓通过RIE在室温下对MEMS应用进行控制
- 作者：D. Vrtacnik;D. Resnik;U. Aljancic;M. Mozek;S. Amon
- 会议名称：《Conference on Device and Process Technologies for Microelectronics, MEMS, and Photonics》 | 2006年
- reactive ion etching;
- etching rate;
- etching selectiveity;
- undercut;
- load;
- aspect ratio dependent etching;
73.KOH etching process of perfect square MEMS corrugated diaphragm

机译：Perte Starme MEMS波纹隔膜的KOH蚀刻工艺
- 作者：N. Soin;Burhanudin Y. Majlis;SPIE-The International Society for Optical Engineering;Queensland University of Technology(AU);Air Force Office of Scientific Research Asian Office of Aerospace Research and Development(JP)
- 会议名称：《Conference on Device and Process Technologies for Microelectronics, MEMS, and Photonics》 | 2006年
74.Dynamic analysis of a compliant bistable micromechanism with one DOF system

机译：一种DOF系统的符合双稳态微机械的动态分析
- 作者：Jinni Tsay;Cheng-Kuo Sung
- 会议名称：《Conference on Device and Process Technologies for Microelectronics, MEMS, and Photonics》 | 2006年
- Bistable Micromechanism;
- Compliant Micromechanism;
- dynamic characteristics;
75.Conductivity of self-organized silicon quantum dots embedded in silicon dioxide

机译：嵌入二氧化硅中的自组织硅量子点的电导率
- 作者：Thipwan Fangsuwannarak;Edwin Pink;Yidan Huang;Young Hyun Cho;Gavin Conibeer;Tom Puzzer;Martin A. Green;SPIE-The International Society for Optical Engineering;Queensland University of Technology(AU);Air Force Office of Scientific Research Asian Office of Aerospace Research and Development(JP)
- 会议名称：《Conference on Device and Process Technologies for Microelectronics, MEMS, and Photonics》 | 2006年
- silicon;
- quantum dots;
- superlattice;
- conductivity;
- photovoltaics;
- tandem cells;
- third generation photovoltaic;
76.Effect of a buffer layer on the photovoltaic properties of AZO/Cu_2O Solar Cells

机译：缓冲层对Azo / Cu_2O太阳能电池光伏性能的影响
- 作者：Toshihiro Miyata;Tadatsugu Minami;Hideki Tanaka;Horotoshi Sato;SPIE-The International Society for Optical Engineering;Queensland University of Technology(AU);Air Force Office of Scientific Research Asian Office of Aerospace Research and Development(JP)
- 会议名称：《Conference on Device and Process Technologies for Microelectronics, MEMS, and Photonics》 | 2006年
77.Preparation of photo functional material

机译：光功能材料的制备
- 作者：M.Ozaki;Y.Kagami;M.Wada;N.Ogata;K.Mito;T.Ishikawa;S.Horinouchi;SPIE-The International Society for Optical Engineering;Queensland University of Technology(AU);Air Force Office of Scientific Research Asian Office of Aerospace Research and Development(JP)
- 会议名称：《Conference on Device and Process Technologies for Microelectronics, MEMS, and Photonics》 | 2006年
- DNA polymer gel;
- DNA-lipid;
- amplified spontaneous emission;
- threshold;
78.Dynamic Analysis of a Compliant Bistable Micromechanism with One DOF System

机译：一种DOF系统的符合双稳态微机械的动态分析
- 作者：Jinni Tsay;Cheng-Kuo Sung;SPIE-The International Society for Optical Engineering;Queensland University of Technology(AU);Air Force Office of Scientific Research Asian Office of Aerospace Research and Development(JP)
- 会议名称：《Conference on Device and Process Technologies for Microelectronics, MEMS, and Photonics》 | 2006年
- bistable micromechanism;
- compliant micromechanism;
- dynamic characteristics;
79.Preparation of photo functional material

机译：光功能材料的制备
- 作者：M. Ozaki;Y. Kagami;M. Waga;N. Ogata;K. Mito;T. Ishikawa;S. Horinouchi
- 会议名称：《Conference on Device and Process Technologies for Microelectronics, MEMS, and Photonics》 | 2006年
- DNA polymer gel;
- DNA-lipid;
- Amplified spontaneous emission;
- threshold;
80.Effect of a buffer layer on the photovoltaic properties of AZO/Cu2O solar cells

机译：缓冲层对Azo / Cu2O太阳能电池光伏性能的影响
- 作者：Toshihiro Miyata;Tadatsugu Minami;Hideki Tanaka;Horotoshi Sato
- 会议名称：《Conference on Device and Process Technologies for Microelectronics, MEMS, and Photonics》 | 2006年
81.Anomalous backward scattering of light by a two-side-open subwavelength metallic slit

机译：双侧开放亚波长金属狭缝光的异常向后散射
- 作者：M. Mechler;S. V. Kukhlevsky;SPIE-The International Society for Optical Engineering;Queensland University of Technology(AU);Air Force Office of Scientific Research Asian Office of Aerospace Research and Development(JP)
- 会议名称：《Conference on Device and Process Technologies for Microelectronics, MEMS, and Photonics》 | 2006年
82.Conductivity of self-organized silicon quantum dots embedded in silicon dioxide

机译：嵌入二氧化硅中的自组织硅量子点的电导率
- 作者：Thipwan Fangsuwannarak;Edwin Pink;Yidan Huang;Young H. Cho;Gavin Conibeer;Tom Puzzer;Martin A. Green
- 会议名称：《Conference on Device and Process Technologies for Microelectronics, MEMS, and Photonics》 | 2006年
- Silicon;
- Quantum dots;
- Superlattice;
- Conductivity;
- Photovolaics;
- Tanddem cells;
- Third gengration;
- photovoltaic;
83.Nano-explosions in porous silicon

机译：多孔硅爆炸
- 作者：Monuko du Plessis;Corrie Conradie;SPIE-The International Society for Optical Engineering;Queensland University of Technology(AU);Air Force Office of Scientific Research Asian Office of Aerospace Research and Development(JP)
- 会议名称：《Conference on Device and Process Technologies for Microelectronics, MEMS, and Photonics》 | 2006年
- nano-explosions;
- silicon;
- porous silicon;
84.KOH etching process of perfect square MEMS corrugated diaphragm

机译：Perte Starme MEMS波纹隔膜的KOH蚀刻工艺
- 作者：N. Soin;Burhanudin Y. Majlis
- 会议名称：《Conference on Device and Process Technologies for Microelectronics, MEMS, and Photonics》 | 2006年
85.Nano-explosions in porous silicon

机译：多孔硅爆炸
- 作者：Monuko du Plessis;Corrie Conradie
- 会议名称：《Conference on Device and Process Technologies for Microelectronics, MEMS, and Photonics》 | 2006年
- Nano-explosions;
- silicon;
- porous silicon;
86.Anomalous backward scattering of light by a two-side-open subwavelength metallic slit

机译：双侧开放亚波长金属狭缝光的异常向后散射
- 作者：M. Mechler;S. V. Kukhlevsky
- 会议名称：《Conference on Device and Process Technologies for Microelectronics, MEMS, and Photonics》 | 2006年
87.The effect of temperature and gas flow on the physical vapour growth of mm-scale rubrene crystals for organic FETs

机译：温度和气体流动对有机FET的MM尺寸毒物晶体物理蒸汽生长的影响
- 作者：A.R. Ullah;A.P. Micolich;J.W. Cochrane;A.R. Hamilton
- 会议名称：《Conference on Device and Process Technologies for Microelectronics, MEMS, and Photonics》 | 2008年
- rubrene crystal growth;
- physical vapour transport;
- organic field-effect transistors;
- temperature;
- gas flow;
88.Novel MEMS-based Thermometer with Low Power-Consumption for Health-Monitoring Network Application

机译：基于新型的基于MEMS的温度计，用于健康监测网络应用的低功耗
- 作者：Y. Zhang;T. Ikehara;J. Lu;T. Kobayashi;M. Ichiki;T. Itoh;R. Maeda
- 会议名称：《Conference on Device and Process Technologies for Microelectronics, MEMS, and Photonics》 | 2008年
- MEMS;
- bimorph;
- thermometer;
- health-monitoring network;
89.Specialized hybrid batch fabrication process for MEMS RF voltage sensors

机译：MEMS RF电压传感器的专用混合批量制造工艺
- 作者：Jan Dittmer;Rolf Judaschke;Stephanus Buettgenbach
- 会议名称：《Conference on Device and Process Technologies for Microelectronics, MEMS, and Photonics》 | 2008年
- MEMS;
- RF voltage measurement;
- electrostatic;
- bulk silicon;
90.A micro solar heater for portable energy generation

机译：用于便携式能量发电的微太阳能加热器
- 作者：Raul Zimmerman;Graham Morrison;Owen The;Gary Rosengarten
- 会议名称：《Conference on Device and Process Technologies for Microelectronics, MEMS, and Photonics》 | 2008年
- micro heater;
- micro reactor;
- solar hydrogen;
- portable energy;
91.Measurements of silicon dry-etching rates and profiles in MEMS foundries and their application to MEMS design software.

机译：MEMS铸造件中硅干蚀刻速率和曲线的测量及其在MEMS设计软件中的应用。
- 作者：T. Takano;T. Ikehara;R. Maeda
- 会议名称：《Conference on Device and Process Technologies for Microelectronics, MEMS, and Photonics》 | 2008年
- DRIE;
- dry etching;
- bosch process;
- MEMS design software;
92.Mechanical characteristics of filter structures for MEMS adaptive infrared detectors

机译：MEMS自适应红外探测器过滤器结构的机械特性
- 作者：H. Huang;S. Liu;J. M. Dell;L. Faraone
- 会议名称：《Conference on Device and Process Technologies for Microelectronics, MEMS, and Photonics》 | 2008年
- mechanical design;
- fabry perot filter;
- infrared detector;
- finite element model;
93.Mechanical quality factor of microcantilevers for mass sensing applications

机译：用于大规模传感应用的微电子机械质量因子
- 作者：Jian Lu;Tsuyoshi Ikehara;Yi Zhang;Takashi Mihara;Ryutaro Maeda
- 会议名称：《Conference on Device and Process Technologies for Microelectronics, MEMS, and Photonics》 | 2008年
- microcantilever;
- Q-factor;
- energy dissipation;
- air damping;
- support loss;
- thermoelastic damping;
- MEMS;
94.Design and fabrication process of a micropump using bulk Pb(Zr,Ti)O_3 for microfluidic devices

机译：用于微流体装置的散装PB（Zr，Ti）O_3的微泵的设计和制造过程
- 作者：Ryohei Sakamoto;Van Thanh Dau;Dzung Viet Dao;KatsuhikoTanaka;Susumu Sugiyama
- 会议名称：《Conference on Device and Process Technologies for Microelectronics, MEMS, and Photonics》 | 2008年
- PZT;
- micro jet pump;
95.Study on In-Situ measuring method for average stress gradient of a MEMS film

机译：MEMS膜平均应力梯度的原位测量方法研究
- 作者：Hua Rong;Ming Wang
- 会议名称：《Conference on Device and Process Technologies for Microelectronics, MEMS, and Photonics》 | 2008年
- average stress gradient;
- cantilever;
- pull-in voltage;
- transverse bending;
- plate theory;
96.Four-Tip Scanning Tunneling Microscope for Measuring Transport in Nanostructures

机译：用于测量纳米结构运输的四尖扫描隧道显微镜
- 作者：Shuji Hasegawa;Shinya Yoshimoto;Rei Hobara
- 会议名称：《Conference on Device and Process Technologies for Microelectronics, MEMS, and Photonics》 | 2008年
97.Design, Fabrication and Testing of 3C-SiC Sensors for High Temperature Applications

机译：用于高温应用的3C-SiC传感器的设计，制造和测试
- 作者：Michele Pozzi;Alun J. Harris;James S. Burdess;Petros Argyrakis;Kin K. Lee;Rebecca Cheung;Gordon J. Phelps;Nick G. Wright
- 会议名称：《Conference on Device and Process Technologies for Microelectronics, MEMS, and Photonics》 | 2008年
- silicon carbide;
- MEMS sensor;
- capacitive;
- accelerometer;
- pressure;
- optical profilometry;
- high temperature;
- harsh environment;
98.Inkjet printing: a viable tool for processing polymer carbon nanotube composites

机译：喷墨印花：用于加工聚合物碳纳米管复合材料的可行工具
- 作者：Marc in het Panhuis;William R. Small
- 会议名称：《Conference on Device and Process Technologies for Microelectronics, MEMS, and Photonics》 | 2008年
- inkjet printing;
- carbon nanotubes;
- conducting polymers;
- polyaniline;
- sensors;
- alcohol;
99.Photovoltaic properties of ferroelectrics and its applications to optical sensor

机译：铁电气的光伏性能及其在光学传感器的应用
- 作者：Masaaki Ichiki;Harumi Furue;Takeshi Kobayashi;Yasushi Morikawa;Kazuhiro Nonaka;Ryutaro Maeda
- 会议名称：《Conference on Device and Process Technologies for Microelectronics, MEMS, and Photonics》 | 2008年
- photovoltaic effect;
- PLZT;
- layered film;
- MOD;
- tensor surface;
- perovskite;
100.Micropatterning research of silicon-based ferroelectric PMNT thin films

机译：硅基铁电PMNT薄膜的微图解研究
- 作者：Qingtao Zhang;Yanqiu Li;Yonghong Shang
- 会议名称：《Conference on Device and Process Technologies for Microelectronics, MEMS, and Photonics》 | 2006年
- Ferroelectric;
- Micro patterning;
- PMNT;
- Thin Films;
- Sol-Gel;