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FILM FORMATION METHOD BY VACUUM DEPOSITION, FILM FORMATION SYSTEM BY VACUUM DEPOSITION, AND CRYSTALLINE VACUUM DEPOSITION FILM
FILM FORMATION METHOD BY VACUUM DEPOSITION, FILM FORMATION SYSTEM BY VACUUM DEPOSITION, AND CRYSTALLINE VACUUM DEPOSITION FILM
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机译:真空沉积的成膜方法,真空沉积的成膜系统和结晶真空沉积膜
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摘要
PROBLEM TO BE SOLVED: To provide a new and effective means to highly crystallize a vacuum deposition film when forming the vacuum deposition film of an organic semiconductor.SOLUTION: The film formation method by vacuum deposition uses, as a concurrently evaporating substance, an inactive molecule which has vapor pressure of 1 Pa or less at room temperature but shows higher vapor pressure than that of an organic semiconductor molecule, evaporates or sublimes under the vacuum deposition condition, and exhibits volatility on a heated substrate, when vacuum-depositing the organic semiconductor molecule constituting the vapor deposition film of the organic semiconductor on the substrate.
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