Vacuum film-forming apparatus for preventing plate, vacuum deposition apparatus, and, vacuum film formation method

摘要

PROBLEM TO BE SOLVED: To provide a deposition preventing plate for a vacuum film deposition apparatus excellent in exfoliation prevention effect of a film deposition material, and a production method thereof, and to provide a vacuum film deposition apparatus and a vacuum film deposition method using this deposition preventing plate.;SOLUTION: A deposition preventing plate for a vacuum film deposition apparatus is used for preventing adhesion of a film deposition material onto an unnecessary position in the vacuum film deposition apparatus. The deposition preventing plate for the vacuum film deposition apparatus is made of aluminum, has a surface having an uneven structure including recessed parts having the average opening diameter of 0.01-9 μm, and has the arithmetic average roughness Ra of the surface of 0.20 μm or more.;COPYRIGHT: (C)2014,JPO&INPIT