COATING LIQUID FOR FORMING METAL OXIDE THIN FILM METAL OXIDE THIN FILM FIELD-EFFECT TRANSISTOR AND METHOD FOR MANUFACTURING FIELD-EFFECT TRANSISTOR

摘要

A metal oxide thin film formed of the coating liquid for the present invention is an inorganic indium compounds; Inorganic calcium compound, strontium compound, or inorganic, or both; And an organic solvent. Oxide semiconductor formed by applying the coating liquid is used for the active layer of the field effect transistor. ;