FERROELECTRIC MATERIAL, MEMS COMPONENT COMPRISING THIS MATERIAL, MEMS DEVICE, AND PRODUCTION METHOD

摘要

Ferroelectric material comprising a mixed crystal comprising AlN and at least one transition metal nitride. The proportion of the transition metal nitride is chosen such that a direction of an initial or spontaneous polarity of the ferroelectric material is switchable by a switchover voltage being applied. In this case, the switchover voltage is below a breakdown voltage of the ferroelectric material.