DEVICE FOR SUPPORTING A MEMS COMPONENT, ARRAY OF THE DEVICE FOR SUPPORTING A SYSTEM COMPRISING THE DEVICE, METHOD FOR MANUFACTURING THE DEVICE FOR SUPPORTING A MEMS COMPONENT AND USE OF WALLS FOR SURROUNDING A MEMS COMPONENT

摘要

The invention relates to a device for supporting a MEMS component, especially a pressure sensor, having a substrate formed of a ceramic, a MEMS component on the substrate and walls forming a cavity for surrounding the MEMS component, in which the walls are formed from a machined ceramic cavity array.