A ferroelectric material, a MEMS component including a ferroelectric material, a MEMS device comprising a first MEMS component, a method of manufacturing MEMS component, and a method of manufacturing a CMOS compliant MEMS component

摘要

A ferroelectric material having mixed crystals containing AlN and at least one transition metal nitride. The ratio of the transition metal nitride is selected so that the initial or spontaneous polarity direction of the ferroelectric material can be switched by application of a switching voltage. The switching voltage is lower than the breakdown voltage of the ferroelectric material.Selection diagram