High-shear-velocity Composite Acoustic Materials of AlN/Diamond for Biological MEMS Devices

摘要

Shear horizontal (SH) surface acoustic wave (SAW) sensors formed by combining (100) AlN films with a diamond substrate have been developed in this research. The propagation characteristics of SAW in four composite structures according to the positions of interdigital transducer (IDT) electrodes and/or thin metal films were investigated theoretically. Those composite SAW substrates exhibited excellent SH SAW properties and have the potential for further application in biological and liquid SAW sensors.