首页> 外国专利> Polishing liquid, manufacturing method of polishing liquid, polishing liquid stock solution, polishing liquid stock solution, chemical mechanical polishing method

Polishing liquid, manufacturing method of polishing liquid, polishing liquid stock solution, polishing liquid stock solution, chemical mechanical polishing method

机译:抛光液,抛​​光液的制造方法,抛光液原液,抛光液原液,化学机械抛光方法

摘要

An object of the present invention is to provide a polishing liquid in which dishing and defects are less likely to occur on a polished surface when applied to CMP of a to-be-polished object including a cobalt-containing layer. Another object of the present invention is to provide a method for producing a polishing liquid, a polishing liquid stock solution, a polishing liquid stock solution receptor, and a chemical mechanical polishing method. The polishing liquid of the present invention is a polishing liquid for chemical mechanical polishing containing colloidal silica having an association degree of 1 to 3, an organic acid, an azole compound, and hydrogen peroxide, wherein the polishing liquid is in contact with the cobalt substrate for 24 hours. When it makes it, the reaction layer of thickness 0.5-20 nm containing a cobalt atom is formed on the said cobalt substrate.
机译:本发明的目的是提供一种抛光液,当将其应用于包括含钴层的待抛光对象的CMP时,在抛光表面上不大可能出现凹陷和缺陷。本发明的另一个目的是提供一种制造抛光液的方法,一种抛光液原液,一种抛光液原液接受体以及一种化学机械抛光方法。本发明的抛光液是用于化学机械抛光的抛光液,其包含缔合度为1至3的胶体二氧化硅,有机酸,唑化合物和过氧化氢,其中该抛光液与钴基底接触。 24小时。在上述钴基板上形成含有钴原子的厚度为0.5〜20nm的反应层。

著录项

  • 公开/公告号KR20190109450A

    专利类型

  • 公开/公告日2019-09-25

    原文格式PDF

  • 申请/专利权人 후지필름 가부시키가이샤;

    申请/专利号KR20197023863

  • 发明设计人 카미무라 테츠야;

    申请日2018-02-26

  • 分类号C09G1/02;B24B37;C09K3/14;H01L21/304;

  • 国家 KR

  • 入库时间 2022-08-21 11:49:46

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