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MEMS-device manufacturing method, MEMS device, and MEMS module
MEMS-device manufacturing method, MEMS device, and MEMS module
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机译:MEMS装置的制造方法,MEMS装置及MEMS模块
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摘要
A method for manufacturing a MEMS device includes a hole forming step of forming a plurality of holes concaved from a principal surface in a substrate material including a semiconductor, a connecting-hollow-portion forming step of forming a connecting hollow portion that connects the plurality of holes together, and a movable-portion forming step of, by partially moving the semiconductor of the substrate material so as to close at least one part of the plurality of holes, forming a hollow portion that exists inside the substrate material and a movable portion that coincides with the hollow portion when viewed in a thickness direction of the substrate material.
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